Deep-UV Laser-based Manufacturing Process for Sub-wavelength Structures
نویسندگان
چکیده
منابع مشابه
Light - matter Interaction in Deep Sub - wavelength Nano - photonic Structures
Light-matter Interaction in Deep Sub-wavelength Nano-photonic Structures
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2008
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.74.789